Direct Laser Writer for Maskless Lithography System
3.1 Cost effective maskless lithography: Direct UV laser writing of microstructures for microfluidics applications. 3.2 A programmable mask for direct write lithography. 3.3 Laser writing techniques for photomask fabrication using a femtosecond laser. 3.4 Augmenting mask-based lithography with direct laser writing to increase resolution and speed.