Ultrafast pulsed laser stealth dicing of 4H-SiC wafer ...
DOI: 10.1016/j.jmapro.2022.06.064 Corpus ID: 250649811; Ultrafast pulsed laser stealth dicing of 4H-SiC wafer: Structure evolution and defect generation @article{Wang2022UltrafastPL, title={Ultrafast pulsed laser stealth dicing of 4H-SiC wafer: Structure evolution and defect generation}, author={Lingfeng Wang and C. Zhang and Feng Liu and Huai Zheng and Gary J. Cheng}, journal={Journal of ...